pointSEM Zeiss DSM 982 in Detail
High-resolution images for precise analyses.
This pointSEM, based on the DSM 982, is a field emission scanning electron microscope (FEG-SEM). The legendary Zeiss GEMINI® column is complemented by our state-of-the-art, high-performance electronics and powerful, versatile control software – made by point electronic.
This versatile FEG-pointSEM enables operation at low voltage and high resolution. It features an efficient In-Lens detector, a stage with four motorized axes, and allows for a high beam current that can be focused on very small samples.
Magnetic Field Compensation by Spicer Consulting
- Minimizes external electromagnetic interference on image quality and measurement accuracy
- Enables higher resolution, more stable images, and reproducible analysis results
Independent power supply and surge protection
- Ensures operation during power outages
- Protection against voltage fluctuations and surges
- Reduces downtime of your pointSEM
Plasma cleaner
- Reduces contaminants
- Improves image quality
- Fewer artifacts
- More stable and reliable measurement results, especially at high resolutions
Compressors
- Supplies auxiliary units and infrastructure systems
- Supports stable operation
- Prevents operational disruptions
- Increases system availability
Recirculation cooler
- Constant operating temperature of important system components of your pointSEM
- Reduces temperature-induced fluctuations
Vacuum pumps
We offer suitable vacuum pumps for your pointSEM:
- Foreline pumps
- Turbo pumps
Soundproof boxes
- Reduces noise pollution from pumps and compressors
- Decreases disturbing vibrations for your pointSEM
EDX by Bruker
- Qualitative and quantitative material analyses - from Boron (5) to Californium (98)
- Composition assessments, line scanning, spectral element mapping
EBSD by Bruker
- Material investigations of crystallographic structures
- Analysis of grain orientations, phase distributions, and deformation states
Premium BSE Detector
- Fast, efficient, and versatile detector for materials science
- Rapid imaging in sub-microseconds
- Operation at low kV
High-Temperature BSE Detector
- Unique light-insensitive detector for in-situ/in-operando microscopy
- High efficiency in the low kV range
- Equipped with water cooling
3D Topography Bundle
- The only solution for quantitative and calibrated real-time measurement of surface heights
- Real-time 3D visualization
- Manufacturer-independent
3D Calibration kit
- 3D calibration of your sample
- Determination of the accuracy of your 3D measurements
- Quantitative evaluation of surface and height features
Electrical Analysis in SEM
- Visualization of electronic defects and properties (EBIC, RCI, EBIRCH)
- Multichannel imaging, live color mixing, quantitative signal analysis, in-situ preamplification, integrated lock-in EA
