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pointSEM Zeiss LEO 1530

Key Facts

Image Processing
  • Resolution: up to 23,000 × 23,000 pixels
  • Dwell time: 10 ns – 500 ms per pixel
  • Magnification range: 15 – 1,000k
  • Image shift range: ±100 µm
Resolution at WD = 2 mm
  • 20 kV: 1 nm
  • 10 kV: 1.5 nm
  • 1 kV: 2.3 nm
  • 0.2 kV: 5 nm
Emitter
  • Schottky-Feldemitter (FEG)
Acceleration voltage
  • 0.1 – 30 kV
Beam current
  • 12 steps: 4 pA to 10 nA
Detectors
  • In-lens detector: SE
  • In-chamber Everhart-Thornley detector (ETD): SE
Chamber
  • Inner diameter: 330 mm
  • Height: 270 mm
Stage
  • Type: Eccentric
  • Number of axes: 5 (4 motorized)
  • X travel: 75 mm
  • Y travel: 75 mm
  • Z travel: 55 mm (25 mm motorized)
  • Z fine adjustment: 10 mm
  • Rotation: 360°
  • Tilt: -15° – 90° (manual)
pointSEM based on a Zeiss LEO 1530

pointSEM ZEISS LEO 1530 in Detail

High-resolution images for precise analyses.

This pointSEM is based on a used LEO 1530 and is a Schottky field emission scanning electron microscope (FEG-SEM). The legendary Zeiss GEMINI® column has been enhanced with state-of-the-art, completely new electronics and powerful control software - made by point electronic.

The LEO 1530 features an efficient In-Lens detector and delivers excellent performance in the low kV range, enabling high sample throughput with superior image quality.

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Our pointSEM inclusive service

We support you from installation to long-term operation.


10+ Years spare parts guarantee

Long-term availability of all point electronic spare parts for maximum operational reliability.


Warranty on all components 

1 year warranty on our point electronic parts, 6 months on all original parts.


Delivery, Installation included 

Your SEM will be delivered complete, installed, and commissioned – at no additional cost.


Ready to use immediately 

The workstation PC is fully set up and preconfigured for controlling the pointSEM.


Training for your team 

Practical training for the secure and efficient use of the pointSEM control software.

More for your microscope

Expand the capabilities of your pointSEM with our add-ons

Magnetic field compensation by Spicer Consulting
Magnetic Field Compensation by Spicer Consulting
  • Minimizes external electromagnetic interference on image quality and measurement accuracy
  • Enables higher resolution, more stable images, and reproducible analysis results
Independent Power Supply and Surge Protection
  • Ensures operation during power outages
  • Protection against grid fluctuations and surges
  • Reduces downtime of your pointSEM
Plasma Cleaner
  • Reduces contaminations
  • Improves image quality
  • Fewer artifacts
  • More stable and reliable measurement results, especially at high resolutions
Compressors
  • Supplies auxiliary units and infrastructure systems
  • Supports stable operation
  • Prevents operational disruptions
  • Increases system availability
Recirculating Cooler
  • Constant operating temperature of important system components of your pointSEM
  • Reduces temperature-induced fluctuations
Vacuum Pumps

We offer suitable vacuum pumps for your pointSEM: 

  • Foreline pumps 
  • Turbo pumps
Soundproof Boxes
  • Reduces noise pollution caused by pumps and compressors
  • Minimizes disturbing vibrations for your pointSEM

More technologies for your pointSEM

Analytical add-ons

EDX by Bruker
  • Qualitative and quantitative material analyses - from Boron (5) to Californium (98)
  • Composition evaluations, line scanning, spectral element mapping
EBSD by Bruker
  • Material investigations of crystallographic structures
  • Analysis of grain orientations, phase distributions, and deformation states
Premium BSE Detector
  • Fast, efficient, and versatile detector for materials science
  • Rapid imaging in sub-microseconds
  • Operation at low kV
High-Temperature BSE Detector
  • Unique light-insensitive detector for in-situ/in-operando microscopy
  • High efficiency in the low kV range
  • With water cooling
3D Topography Bundle
  • The only solution for quantitative and calibrated real-time surface height measurement
  • Real-time 3D visualization
  • Manufacturer-independent
3D Calibration Bundle
  • 3D calibration of your sample 
  • Determination of the accuracy of your 3D measurements
  • Quantitative evaluation of surface and height features
Electrical Analysis in the SEM
  • Visualization of electronic defects and properties (EBIC, RCI, EBIRCH)
  • Multichannel imaging, live color mixing, quantitative signal analysis, in-situ pre-amplification, integrated lock-in EA

Precise SEM analysis.

Quickly installed.

Immediately ready for use.

With your pointed ZEISS LEO 1530, you receive a powerful SEM system including installation, pre-configured workstation PC, and personal support.

  • Installation and training included
  • 10+ years of spare parts availability
  • Personal contact person
     

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The performance values and data provided on this website correspond to the typical results obtained during tests at our facility under specific test conditions. They do not represent guaranteed values for on-site use.